MEMS Definition
mĕmz
noun
A technology that combines tiny electronic and mechanical parts to create systems with moving parts on a scale ranging from microns to a millimeter, typically using silicon or silicon-based fabrication methods.
American Heritage
Devices, machines, or systems fabricated using this technology.
American Heritage
Plural form of mem.
Wiktionary
Origin of MEMS
m(icro)e(lectro)m(echanical) s(ystems)
From American Heritage Dictionary of the English Language, 5th Edition
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